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Failure Assessment In Aerospace Systems Via Integrated Multi-functional Sensors

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Failure Assessment In Aerospace Systems Via Integrated Multi-functional Sensors

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dc.contributor.author Gonenli, Ismail Erkin en_US
dc.date.accessioned 2010-07-19T19:55:00Z
dc.date.available 2010-07-19T19:55:00Z
dc.date.issued 2010-07-19
dc.date.submitted January 2010 en_US
dc.identifier.other DISS-10674 en_US
dc.identifier.uri http://hdl.handle.net/10106/4940
dc.description.abstract Integrated sensors fabricated on flexible substrates show lots of promise due to their ability to conform on non-planar surfaces. Potential applications could be smart-skin and wearable electronics which can be used on prosthetic devices or in harsh environments to provide with the sense of feel of the ambient. Design, fabrication and characterization of MEMS piezoresistive pressure sensors and capacitive accelerometers were done on Si and flexible polymer substrates using surface micromachining to be used on aerospace applications. Devices were successfully tested on planar surfaces.For the pressure sensor fabrication, Si3N4 was used as a membrane material due to its linearity and high elasticity while polysilicon was used as a piezoresistive material because of its high gauge factor as well as linear response. Response measurements of fabricated devices resulted in slightly lower values compared to the ones obtained from simulations.Accelerometer fabrication was done with UV-LIGA (Ultra-violet Lithographie, Galvanoformung, Abformung). Ni was used as a proof mass because of its relatively high density and corrosion resistance. Response measurements of fabricated accelerometers resulted in higher values compared to simulated ones. Although there was difference between simulated and fabricated responses, device measurements on Si and flexible substrates showed comparable values. en_US
dc.description.sponsorship Celik-Butler, Zeynep en_US
dc.language.iso EN en_US
dc.publisher Electrical Engineering en_US
dc.title Failure Assessment In Aerospace Systems Via Integrated Multi-functional Sensors en_US
dc.type Ph.D. en_US
dc.contributor.committeeChair Celik-Butler, Zeynep en_US
dc.degree.department Electrical Engineering en_US
dc.degree.discipline Electrical Engineering en_US
dc.degree.grantor University of Texas at Arlington en_US
dc.degree.level doctoral en_US
dc.degree.name Ph.D. en_US
dc.identifier.externalLink https://www.uta.edu/ra/real/editprofile.php?onlyview=1&pid=11
dc.identifier.externalLinkDescription Link to Research Profiles

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